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National Repository of Grey Literature 1 records found  Search took 0.01 seconds. 
Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization
 Kromka, Alexander ; Babchenko, Oleg ; Ižák, Tibor ; Potocký, Štěpán ; Davydova, Marina ; Neykova, Neda ; Kozak, Halyna ; Remeš, Zdeněk ; Hruška, Karel ; Rezek, Bohuslav
A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area.
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